关键词：致动器；传感器；机电系统；Mems(微型机电系统)；Nems(纳米机电系统)
摘 要：The Berkeley Sensor & Actuator Center at the University of California Berkeley has, for more than twenty‐five years, had a major impact on the research foundations and consequent commercialization of MEMS and NEMS. This has been achieved through creative combinations of resources, incentives, and shared goals involving Academia, Industry, and Government. The strongly multidisciplinary and interdisciplinary operational model of BSAC (a National Science Foundation Industry/University Cooperative Research Center) is described.