硅绝缘体(SOI)微机电系统(MEMS)陀螺传感器作为两轴加速度计的操作
Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer
关键词:光机电;传感器;硅绝缘体;微机电系统
摘 要:This report documents the idea or concept of operating an existing Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) gyroscopic sensor previously developed in the early-2000s under MEMS-Based Angular Rate Sensor (MBARS) and MicroControlled Array Sensors (mCAS). This report serves as documented evidence for future use of this open-sourced idea of the measurement of two-axis of linear acceleration from a previous sensor originally designed to operate as a single-axis rotation sensor.