关键词：MEMS；质量因子；兰姆波；谐振器
摘 要：In this report, basic analysis of the Lamb waves propagating in AlN and the device design techniques are presented in detail. Then, a novel technique to enhance the quality factor (Q) of Lamb wave resonator by utilizing an AlN plate formed in a butterfly shape is investigated in this paper.The finite element analysis (FEA) simulation results show that the butterflyshaped topology can efficiently change the displacement field in the AlN plate and reduce the vibration in the support tethers.