关键词：光机电；传感器；MEMS；集成
摘 要：The miniaturization of a sound detection system is of great interest to applications such as sniper location. Current systems in use are larger and do not provide for the unencumbered movement of the warfighter. Inspiration for a smaller MEMS based sensor is therefore taken from the aural system of the fly Ormia ochracea. The focus of this thesis is the design of an integrated and miniaturized device utilizing commercial-off-the-shelf readout electronics with the biologically inspired sensor. An analysis of previously used techniques is presented along with a novel fullyintegrated miniaturized design. Specific investigations include integration with external readout electronics, a hybrid discrete component design, and the fully-integrated single package design. Results include successful operation at all levels of integration and a more thorough analysis of the performance of the fully-integrated design.