关键词：低电压；光电二极管；APD
摘 要：Here we report a Si-Ge avalanche photodiode (APD) with a breakdown voltage of only -10V. The highest measured bandwidth is 15.8GHz for a 20μm diameter device. A bandwidth of 13.2 GHz at gain of 22.2 is obtained for the same device, giving a 290GHz gain-bandwidth product at 1550nm wavelength.