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绝缘体上硅(SOI)操作的微型机电系统(MEMS)的一二轴加速度计陀螺传感器

Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer

作者:Hudson, T. D.Kranz, M. S. 作者单位:Army Aviation and Missile Command, Redstone Arsenal, AL. Missile Research Development and Engineering Center. 加工时间:2013-12-22 信息来源:科技报告(AD) 索取原文[22 页]
关键词:传感器;陀螺;加速度计;探测器;微机电系统;旋转;绝缘体上硅
摘 要:This report documents the idea or concept of operating an existing Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) gyroscopic sensor previously developed in the early-2000s under MEMS-Based Angular Rate Sensor (MBARS) and MicroControlled Array Sensors (mCAS). This report serves as documented evidence for future use of this open-sourced idea of the measurement of two-axis of linear acceleration from a previous sensor originally designed to operate as a single-axis rotation sensor.
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