关键词：滚珠螺杆驱动的阶段；摩擦补偿；弹性变形
摘 要：Ball-screw-driven stages are extensively used in industry for high-precision fabrication thanks to the low cost and high efficiency. However, spring-like nonlinear frictions including the friction at the linear guide and the friction within screw and nut grooves can significantly degrade the control performance. In this paper, the effectiveness and imperfection of conventional friction compensation is firstly analyzed. Then, a novel friction compensation method considering load-side frictions is proposed to enhance the control performance. Simulations and experiments are also performed to evaluate the effectiveness of the proposed method.