关键词：偏置电压；电压波动；微机械；磁盘阵列
摘 要：Pursuant to circumventing electrical stiffness-based instability, this work introduces a more circuit design-friendly equivalent circuit model that uses negative capacitance to capture the influence of electrical stiffness on device and circuit behavior. This new circuit model reveals that capacitive-gap transduced micromechanical resonators can offer better stability against electrical-stiffness-based frequency instability when used in large mechanically-coupled arrays.