关键词：多材料；低相噪；光机；振荡器
摘 要：The work in this report presents a multi-material RP-OMO that circumvents this limitation by combining a silicon nitride optical material with a lower mechanical loss polysilicon material to attain simultaneous high Qm and Qo. The multi-material RP-OMO structure boosts the Qm of a silicon nitride RP-OMO by more than 2× toward realization of the simultaneous high Qm >22,000 and Qo >190,000 needed to maximize RP-OMO performance. With its high Qm, the multi-material RP-OMO exhibits a best-to-date phase noise of -114 dBc/Hz at 1 kHz offset from its 52-MHz carrier—a 12 dB improvement from the previous best by an RP-OMO constructed of silicon nitride alone.