关键词：最低阶对称模式；温度补偿；半导体；芯片
摘 要：Frequency references with a low phase noise and a low temperature-induced frequency drift are important components for navigation systems, wireless communication systems,and signal processing applications. As is well known, crystal oscillators (XOs) and temperature compensated crystal oscillators (TCXOs) based on AT-cut quartz dominate this market because AT-cut quartz has outstanding frequency-temperature performance and long-term stability. However, there are drawbacks and fabrication limitations for quartz-based resonators related to down-scaling for future applications. In addition, the material properties of quartz limit the integration of the frequency references and the complementary metal-oxide semiconductor (CMOS) circuits on a single chip.