关键词：薄膜；电感器；射频芯片
摘 要：Integration of ferrite films on to the structures of on-chip RF inductor becomes essential for enhancement of inductance density. Here, we will demonstrate low-temperature deposition of ferrite film and its use to attain very high inductance density (680 nH/mm~2 at 5 GHz and 450 nH/mm~2 at 10 GHz).