关键词：激光热分流；混合硅；热效应
摘 要：A hybrid silicon micro-ring laser is a good candidate as light source for low cost and low power consumption data links [1]. However, thermal issues are one of major obstacles to achieve higher energy efficiency and higher integration density. The thick buried oxide (BOX) layer in silicon on insulator (SOI) has a poor thermal conductivity and blocks the heat dissipating into the heat sink. Furthermore ring lasers have a higher thermal impedance due to their small footprint, which makes the performance degrade rapidly at high temperatures [2]. In previous work we reduced device heating with a metal thermal shunt design [3]. In this paper we investigate better thermal management of hybrid silicon ring lasers with an optimized thermal shunt structure.