关键词：多功能芯片；射流功能；生物传感器
摘 要：In the past years, self assembling has been employed to transform two-dimensional (2D) layers into compact three-dimensional (3D) architectures by roll-up of strained nanomembranes. This method has shown to be suitable for the development of versatile on chip devices of customized size and geometry synergetically combining magnetic, electronic, optical and fluidic functions. Various rolled-up magnetic nanomembranes have been fabricated consisting of either magnetic layers with in-plane easy axis of magnetization, i.e. Permalloy, Fe_3Si, Co, Co/Cu or coiled-up initially out-of-plane magnetized Co/Pt multilayers revealing magnetic patterns not existing in nature. More recently, such rolled-up magnetic architectures were applied as compact magneto-electronic devices, in the study of spin-wave interference and in GMR devices, e.g. for the in-flow detection of magnetic objects. In this chapter, we will highlight the most important results of rolled-up magnetic nanomembranes obtained during the last years.