关键词：光机电；传感器；微热量计；性能测试
摘 要：We have produced a variety of superconducting transition edge sensor array designs for microcalorimetric detection of x-rays. Arrays are characterized with a time division SQUID multiplexer such that greater than 10 devices from an array can be measured in the same cooldown. Designs include kilo pixel scale arrays of relatively small sensors (-75 micron pitch) atop a thick metal heatsinking layer as well as arrays of membrane-isolated devices on 250 micron and up to 600 micron pitch. We discuss fabrication and performance of microstripline wiring at the small scales achieved to date. We also address fabrication issues with reduction of absorber contact area in small devices.