关键词：互补金属氧化物半导体；CMOS；芯片；单晶片
摘 要：We present a post-processed 6.25mm2 0.18μm Complementary Metal OxideSemiconductor (CMOS) platform that leverages the advantages of super-paramagneticbead labeling to integrate on-chip the label separation and detection functionalitiesrequired for high sensitivity bio-assays. The surfaces of the CMOS chip and of themagnetic beads are functionalized with bio-chemicals complementary to a target analyte.In a sandwich capture format, the presence of the target analyte will strongly bind 4.5μmmagnetic bead labels to the surface of the chip. The undesired background signal isminimized by the removal of the unbound magnetic beads from the detection array viamagnetic forces generated on-chip. The remaining strongly bound magnetic beads arerespectively magnetized and detected by an array of 128 stacked micro-coil/Hall sensorelements. This single chip solution does not require any external components like pumps,valves or electromagnets and is capable of detecting purified Human antibodies down toconcentrations of 100pg/ml as well as anti-Dengue antibodies in human serum samples.