关键词：微环谐振器；热光效应；硅；马赫-曾德干涉仪
摘 要：Low-power consumption thermo-optically controlled silicon microring resonator loaded Mach-Zehnder modulators and switches (MRR-loaded MZMs/MZ switches) are demonstrated. We experimentally characterized single microring and cascaded-multiple-MRR resonators coupled to one arm of a Mach-Zehnder interferometer (MZI). The anving power consumption of the proposed MZM is significantly reduced owing to the enhanced phase shift in the MRR. The device was fabricated on a silicon-on-insulator (SOI) waveguide structure and each microring is equipped with TiN microheater for thermo-optic tuning. The coupling efficiency between a microring and a busline waveguide was regulated by varying the gap between two waveguides at a directional coupler. Power consumption of a single microring MZI and cascaded MRR-loaded MZMs were approximately 0.4 mW and1mW, respectively. The phase-shift enhancement factor of up to19 with a maximum extinction ratio of18 dB was obtained experimentally. Multiple-wavelength operation was also demonstrated in the cascaded MRR-loaded MZM.