关键词：冲击传感器；铅锆钛酸盐；铁电材料；薄膜；转换器
摘 要：The report documents the characterization of the impulse response of piezoelectric thin-film transducers to low-impacts provided by a 'ball-drop' apparatus and the effects of device size and annealing process on the impulse response. The specific piezoelectric thin-film transducers are 1-micron thick Lead Zirconate Titanate (PZT) films, as deposited by Army Research Laboratory's (ARL's) Sensors and Electronics Devices Directorate in support of Army Technology Objective Sensor, Warhead, and Fuzing Technology Integrated for Combined Effects (SWFTICE) during Fiscal Year (FY) 2011. Summary results are of low-yield for these specific lot fabrications, but iterative designs/fabrications are forthcoming from laboratory fabrication for further testing.