关键词：传感器，宽带；电域；射频；电路；探测器；电磁兼容性；电子光学；高频；高功率；混合动力系统；锂铌酸盐；聚合物；谐振器；灵敏度；硅
摘 要：We report the development of a broadband electric field sensor array technology to detect radio frequency (RF) electromagnetic energy. An approach based on planar electro-optical resonators is considered. We have developed sensors based on electro-optic polymers and sensors based on a hybrid material system consisting of silicon and lithium niobate. Test and measurement of fabricated sensors based on disperse red one electro-optic polymers yielded a sensitivity of 95 Volts per meter per root Hertz in a footprint of 170 micrometers by 270 micrometers. The sensor based on hybrid silicon and lithium niobate was both more sensitive and more miniature. The demonstrated sensitivity was 4.5 Volts per meter per root Hertz and the footprint was 40 micrometers by 40 micrometers. We conclude that electro-optical resonators based on a hybrid material system of silicon and lithium niobate is a promising technology for broadband electric field sensor arrays. The results of this research program advance the state-of-the-art in electric field sensors with a host of applications including electromagnetic compatibility (EMC) measurements, high-frequency electronic circuit diagnostics, medical equipment field monitoring, radio-frequency reception, and high power microwave detection.