关键词：芯片；激光制冷；多重量子井；光学制冷
摘 要：In this project, we investigated a new method, adiabatic quantum cooling, to address issues involved in semiconductor laser cooling. We have developed the theoretical framework, as well as numerical modeling methods to design and model semiconductor devices. We also grew several epitaxial structures with record blue-shift, and process them into suspended ridge structures. A novel processing method is developed that can achieve record high thermal isolation. In order to measure temperature accurately, both micro- thermistor and micro-thermocouple devices were integrated on the chip. We also developed a thermoreflectance temperature mapping system with approximately 300 nm resolution. Achieved temperature sensitivity was about 10 mK. We observe strong cooling component, although we have not achieve net cooling yet. Methods to increase the laser cooling beyond heating power are identified.