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高Q低阻MEMS谐振器

High-Q Low-Impedance MEMS Resonators

作者:Li-Wen Hung Clark Nguyen 作者单位:University of California at Berkeley 加工时间:2013-11-20 信息来源:EECS 索取原文[154 页]
关键词:无线通信标准;收发器;交换器;机电耦合
摘 要:The ever increasing need for regional and global roaming together with continuous advances in wireless communication standards continue to push future transceivers towards an ability to support multi-mode operation with minimal increases in cost, hardware complexity, and power consumption. RF channel-select filter banks pose a particularly attractive method for achieving multiband reconfigurability, since they not only provide the needed front-end reconfigurability, but also allow for power efficient and versatile transceiver designs, e.g., software-defined radio. Such channel-select filters, however, impose requirements on their constituent resonators that are not yet achievable on the micro-scale. Specifically, capacitively-transduced micromechanical resonators achieve highQ, but suffer from high impedance; while piezoelectric micromechanical resonators offer low impedance, but with insufficientQ. This dissertation demonstrates four new techniques to address the issues in both technologies.
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