关键词：传感器；微悬臂梁；癌症研究；肿瘤检测
摘 要：In the last few years, there has been a growing interest in bio- and immunosensors based on function-alized micromachined cantilevers to detect the presence of specific compounds [1]. Microcantilevers (MCs) are single-side-clamped suspended beams that can operate either as surface stress sensor or as microbalance (Figure 46.1). Changes in the surface properties of the MC through binding or hybridization of analytes to the receptors on the MC will directly influence its surface stress, causing the MC to deflect proportionally to the analytes concentration. Otherwise, the mass of the binding entities anchored on the MC surfaces can be detected due to the decrease in the resonant frequency.