关键词：传感器；微角振动试验台；柔性铰链；动态分析；音圈电机
摘 要：The construction and the operating principle of the novel micro-angular vibration testbed (MAVT) are presented, the MAVT is designed to complete the angular performance testing for the micro sensor and parts such as MEMS-gyro, angular accelerometer. A systemic design procedure of the optimized flexure hinge and general voice coil actuator (VCA) to fine single-axis MAVT actuator are introduced for fast and precision actuation. A method for measuring frequency response function by means of a displacement sensor electric eddy current sensor is designed. To verify the performance of the designed MAVT, frequency response of the system are performed, the differential equation of the pull-tilting motion is established according to the Lagrange's equation, the formula of the natural frequency is derived, and the model analysis of the MAVT is also carried out with the help of limited element analysis. The static stiffness experiments show that the angular stroke of the MAVT is 1 ° and preliminary tests performed on the closed-loop control system indicate that angular resolution of 1' can be achieved. Model experiments performed on the prototype of MAVT are presented and the theoretic result fits with the result of experiment (250Hz). For fast and precision actuation performances, design parameters are selected based on the dynamic model of VCA and flexure hinge, and design process is completed. The model results can be provided for the construction design of the MAVT. Conventional platforms of angular performance testing are bulky and costly. Analysis and experiments results indicate that the novel MAVT is an efficient platform to complete the angular performance testing for micro sensor and parts