关键词：HMDSO； TEOS；湿度传感器；电气特性
摘 要：Humidity sensitive layers elaborated from pure HMDSO and TEOS by PECVD technique have been studied. Humidity sensing properties including impedance relative humidity (RH) and current RH characteristics were investigated. TEOS films show higher sensitivity and excellent linearity over the explored range of humidity (20-95% RH). However, HMDSO films exhibits a small response and recovery of about 8 and 34 s for humidification and desiccation, respectively, in addition to very low hysteresis (2%). Structural analyses of sensitive layers were characterized by Fourier transform infrared spectroscopy (FTIR).