关键词：光机电；传感器；纳米结构；阵列
摘 要：The complete list of nanostructured metal oxides and their response to different gaseous species and vapors is shown in Table A.24: The metal oxides include: aluminum, cadmium, cerium, cobalt, copper, gallium, indium, iridium, iron, molybdenum, niobium, nickel, tellurium, tin, titanium, tungsten, vanadium, zinc, zirconium, and mixed oxides. The gaseous species are: acetic acid, acetone, acetylene, ammonia, benzene, butane, carbon dioxide, carbon disulfide, carbon monoxide, chlorine, dimethyl methylphos-phonate, ethyl alcohol, ethylene, formaldehyde, helium, hexane, hydrogen, hydrogen sulfide, LPG, methane, methanol, methyl cyanide, nitrogen oxides, oxygen, ozone, petrol (gasoline), petroleum ether, propane, pro-pene, propanol, propylene, sulfur dioxide, sulfur hexafluoride, toluene, and xylene. Details of the nanostructures of various metal oxides are listed in Table A.2. As it is seen, the tin oxide nanostructures along with mixed oxides are dominating at present. Tungsten nanostructures very closely follow these two oxides. The intention of this table is to give a clear view of these nanostructures. Comparing Table A.2 with Table A.24, it is easy to draw and select the nanostructures for the desired application.