关键词：光机电；传感器；氧化物；气体
摘 要：Sensing behavior is the most important and well-known property of metal-oxide materials. In addition to the sensitivity to light (photon) energy and external pressure, metal oxides demonstrate high sensitivity to their chemical environment. With the capacity to operate in harsh environment, they surpass other chemical sensors in their sensitivity, reliability, and durability. A sensor detects a change in the gas atmosphere due to a change in the electrical properties of sensing elements. It was found that a catalytic reaction and a gas-sensing process on a metal oxide are analogous to each other as both processes involve surface adsorption and chemical reaction with the surrounding gas environment.