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压阻式高量程加速度传感器和有限元分析的结构设计

Structure Design of Piezoresistive High-g Acceleration Sensor and Finite Element Analysis
作者:Lishuang LiuHanchang ZhouJinghan YeHualing Guo 作者单位:National Key Laboratory of Electronic Measurement Technology,North University of China,Taiyuan 030051,P.R.China;National Key Laboratory of Electronic Measurement Technology,North University of China 加工时间:2014-06-26 信息来源:科技报告(Other) 索取原文[5 页]
关键词:高量程加速度传感器;结构设计;压阻式;ANSYS
摘 要:On the basis of the acceleration measurement of high impact,a high-g acceleration sensors of the piezoresistive beam-island structure at four-terminal all fixed supported was designed.Its structure was analyzed.The reasonable structure parameters were chose.And the parameter simulation and modal analysis were completed with ANSYS software.The results show that the sensor can resist 200,000 g overload and meet high impact test requirements.
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