关键词：传感器；磁导率；超导体（材料）；量热仪
摘 要：We have made high resolution x-ray microcalorimeters using superconducting MoAu bilayers and Nb meander coils. The temperature sensor is a Magnetic Penetration Thermometer (MPT). Operation is similar to metallic magnetic calorimeters, but instead of the magnetic susceptibility of a paramagnetic alloy, we use the diamagnetic response of the superconducting MoAu to sense temperature changes in an x-ray absorber. Flux-temperature responsivtty can be large for small sensor heat capacity, with enough dynamic range for applications. We find models of observed flux-temperature curves require several effects to explain flux penetration or expulsion in the microscopic devices. The superconductor is non-local, with large coherence length and weak pinning of flux. At lowest temperatures, behavior is dominated by screening currents that vary as a result of the temperature dependence of the magnetic penetration depth, modified by the effect of the nonuniformity of the applied field occurring on a scale comparable to the coherence length. In the temperature regime where responslvity is greatest, spadal variations in the order parameter become important: both local variations as flux enters/leaves the film and an intermediate state is formed, and globally as changing stability of the electrical circuit creates a Meissner transition and flux is expelled/penetrates to minimize free energy