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在半导体/光电池制造业中加强计量的统计学方法

Statistical Methods for Enhanced Metrology in Semiconductor/Photovoltaic Manufacturing

作者:Dekong Zeng 作者单位:University of California at Berkeley 加工时间:2013-11-20 信息来源:EECS 索取原文[170 页]
关键词:空间统计数据;半导体;光电池;制造业;模拟器
摘 要:The impact of environmental and manufacturing variability is simulated and discussed. A predictive model for manufacturing variability-induced mismatch power loss is proposed and evaluated with various PV array configurations. Finally, spatial statistics are used to model the non-uniformities of solar cell properties. A SPICE-based distributive solar cell simulator is constructed to estimate electrical performance for various defect distribution patterns. Finally, a statistical model is created in order to correlate the spatial characteristics of defect patterns with the corresponding electrical performance.
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