关键词：MEMS;晶体管电路;无线传感器网络
摘 要：In recent years, the push for low power wireless sensor networks has called for the introduction of RF-MEMS transceiver devices capable of operating on scavenged power. The design of ultra-low power MEMS based transceivers stands to revolutionize the fields of industrial monitoring, environmental monitoring, and biomedical imaging.