关键词：扰动观测；运动控制；纳米定位
摘 要：Nanoscale motion control is required for miniaturization and performance improvement of mechatronic systems. In motion control at nanometer scale, disturbances which do not affect the system at macro scale might greatly influence the control performance. The torque ripple caused by distortion of current is one of the most serious disturbance elements and should be eliminated. The compensation method of the distortion of the current has been researched, but conventional method can not be applied to control system in nanometer scale because short sampling time is needed. To address this problem, the method of the filter designing is proposed in this paper. The effect of the distortion of the current can be reduced by designing the filter in disturbance observer to have low-pass filter and band-stop filter. By using high-precision acceleration control based on proposed method, persistent oscillation can be suppressed, control accuracy can be improved. The validity of the proposal is comfirmed by experiments.