关键词：光机电；传感器；高压集成；ISFET pH
摘 要：The long-term goals of this project are to enable observations of pH in the ocean at depths to 2000 m using sensors deployed on autonomous platforms, particularly profiling floats of the type used in the Argo array. These systems will enable robust, basin-scale observations of changing pH driven by natural and anthropogenic processes. Develop a robust and stable pH sensor for deep-sea applications that is based on the Honeywell Durafet Ion Sensitive Field Effect Transistor (ISFET). The sensor should operate to depths of at least 2000 m. It should have a precision of 0.001 pH and a stability of 0.005 pH over periods up to 5 years throughout the oceanic temperature and salinity range. Capabilities will be demonstrated with deployments on four Webb Research Apex profiling floats.