关键词：CMOS；数字逻辑电路；超低功率；NEM；中继
摘 要：In this thesis, prototype relay devices demonstrated by previous studies are discussed and the keyfactors that need to be addressed in order to minimize the switching energy are pointed out. Theminimum switching energy is found to be limited by the contact adhesive force betweencontacts; studies on prototype devices with different contact areas shows that van der Waalsforce between contacts are the main source of adhesion in the prototype mechanical relays.Experiments show that by adding surface coating materials with low Hamaker constant canlower the contact adhesive force.