关键词：光学电路;硅光子;MEMS;带宽
摘 要：Fast optical circuit switches with large port count will allow flexible bandwidth allocation in data center networks by augmenting electrical packet switching. Here we report microsecond speed optical circuit switch with 50x50 port counts implemented on silicon photonics platform using MEMS actuated directional couplers. The switch has fast switching speed (2.5 μs response time), high on-off extinction ratio (25 dB), small footprint (9x9 mm2), and simple fabrication process (3 lithography steps). We believe that our switch port-count can be scaled up to 100 x 100 and beyond.