关键词：精频选择技术；兰姆波；谐振器；谐振器设计；悬挑
摘 要：Aluminum nitride (AlN) Lamb wave resonators (LWRs) utilize piezoelectric transduction to ensure low motional resistance. The resonance frequency of a LWR is defined by interdigital transducer (IDT) pitch and is thus decoupled from the overall device dimensions. This fine frequency selection technique is enabled by adjusting the so-called AlN "overhang" dimension allowing control of relative frequency of Lamb wave resonators in an array to 0.1%. Experimental results suggest the center frequency of LWRs can be linearly adjusted by up to 5% with no significant effect on other resonator parameters includingQ,Rm,C0, andkt2. Closely and evenly spaced AlN Lamb wave resonators, without post-process trimming, demonstrate the potential to realize a pure mechanical, high performance, yet low power RF front-end system.