关键词：控制器；气动定位；PDD ~ 2控制器；刚度；阻尼环
摘 要：In our preceding works, the stage jerk feedback (SJFB) and base plate jerk feedback (BPJFB) schemes were successfully applied in a pneumatically actuated positioning stage. Where the relative position-based PDD~2 controller was used as the outer loop controller to maintain the positioning stability. However, since two accelerometers are used, each on the stage for SJFB and on the base plate for the BPJFB scheme, there is a possibility of modifying the stiffness and damping loops of PDD~2 controller from relative position-based to the relative acceleration-based inputs. Although there is no any advantage from the industrial application point of view, the bitterness of the modified PDD~2 controller is its simple structure while simple control scheme is desired. Therefore, this paper proposes the modification of stiffness and damping loops of PDD~2 controller such that to be energized by the relative acceleration signal. The objective is to check the feasibility of the proposed PDD~2 controller for the positioning performance without and with both SJFB and BPJFB schemes. It will help us in the future to think about calculating the stage acceleration signal through the relative position and base plate acceleration signals. So that there will be no need to use stage accelerometer, which results in the cost-effectiveness of the control system and safety of the setup. The experimental results show almost the same performances for the proposed PDD~2 controller as achieved through the conventional one.