• Ultrapure water (UPW) is necessary when fabricating devices in the semiconductor industry. The device fabrication process involves multiple steps, most of which use ultrapure water. For instance, solvent processing, wafer cleaning, chemical mechanical planarization, and wet etching are all processes that rely on ultrapure water. • While many aspects of device manufacturing use ultrapure water, the chemical mechanical planarization process consumes more ultrapure water than most processes. High volumes of ultrapure water are necessary for slurry production that is used in this process.